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"Profile Measurement of Polished Surface with Respect to a Lattice Plane of ..."

Hiroyuki Fujimoto, Atsushi Waseda, Xiao-Wei Zhang (2011)

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DOI: 10.20965/IJAT.2011.P0179

access: closed

type: Journal Article

metadata version: 2020-07-09

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Hiroyuki Fujimoto, Atsushi Waseda, Xiao-Wei Zhang:
Profile Measurement of Polished Surface with Respect to a Lattice Plane of a Silicon Crystal Using a Self-Referenced Lattice Comparator. Int. J. Autom. Technol. 5(2): 179-184 (2011)

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