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"Kr-Plasma Sputtering for Pt Gate Electrode Deposition on MFSFET with 5 ..."
Joong-Won Shin, Masakazu Tanuma, Shun'ichiro Ohmi (2023)
- Joong-Won Shin, Masakazu Tanuma, Shun'ichiro Ohmi:
Kr-Plasma Sputtering for Pt Gate Electrode Deposition on MFSFET with 5 nm-Thick Ferroelectric Nondoped HfO2 Gate Insulator for Analog Memory Application. IEICE Trans. Electron. 106(10): 581-587 (2023)

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