"Formation of Pd Nanodots Induced by Remote Hydrogen Plasma and Its ..."

Kazuhiro Shimanoe et al. (2009)

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DOI: 10.1587/TRANSELE.E92.C.616

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type: Journal Article

metadata version: 2020-04-11

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Kazuhiro Shimanoe, Katsunori Makihara, Mitsuhisa Ikeda, Seiichi Miyazaki:
Formation of Pd Nanodots Induced by Remote Hydrogen Plasma and Its Application to Floating Gate MOS Memories. IEICE Trans. Electron. 92-C(5): 616-619 (2009)

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