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"PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact ..."

Shun'ichiro Ohmi et al. (2016)

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DOI: 10.1587/TRANSELE.E99.C.510

access: closed

type: Journal Article

metadata version: 2020-04-11

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  dblp key:
  - journals/ieicet/OhmiCWM16
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  persistent URL:
  - https://dblp.org/rec/journals/ieicet/OhmiCWM16
Shun'ichiro Ohmi, Mengyi Chen, Xiaopeng Wu, Yasushi Masahiro:
PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact Resistivity. IEICE Trans. Electron. 99-C(5): 510-515 (2016)

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