"SONOS-Type Flash Memory with HfO2 Thinner than 4 nm as Trapping ..."

Jae Sub Oh et al. (2010)

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DOI: 10.1587/TRANSELE.E93.C.590

access: closed

type: Journal Article

metadata version: 2023-01-18

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Jae Sub Oh, Kwang Il Choi, Young Su Kim, Min Ho Kang, Myeong Ho Song, Sung Kyu Lim, Dong Eun Yoo, Jeong Gyu Park, Hi Deok Lee, Ga Won Lee:
SONOS-Type Flash Memory with HfO₂ Thinner than 4 nm as Trapping Layer Using Atomic Layer Deposition. IEICE Trans. Electron. 93-C(5): 590-595 (2010)

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