"Electrostatically Actuated Two-Dimensional Optical Scanner Having a High ..."

Hiroshi Noge et al. (2008)

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DOI: 10.1093/IETELE/E91-C.10.1611

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type: Journal Article

metadata version: 2020-04-11

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Hiroshi Noge, Yosuke Hagihara, Kiyohiko Kawano, Hideki Ueda, Takaaki Yoshihara:
Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes. IEICE Trans. Electron. 91-C(10): 1611-1615 (2008)

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