"Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC ..."

Takashi Nasuno et al. (2005)

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DOI: 10.1093/IETELE/E88-C.5.796

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type: Journal Article

metadata version: 2020-04-11

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Takashi Nasuno, Yoshihisa Matsubara, Hiromasa Kobayashi, Akiyuki Minami, Eiichi Soda, Hiroshi Tsuda, Koichiro Tsujita, Wataru Wakamiya, Nobuyoshi Kobayashi:
Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns. IEICE Trans. Electron. 88-C(5): 796-803 (2005)

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