"State-of-the-art silicon device miniaturization technology and its challenges."

Changhwan Shin (2014)

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DOI: 10.1587/ELEX.11.20142005

access: open

type: Journal Article

metadata version: 2021-02-12

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Changhwan Shin:
State-of-the-art silicon device miniaturization technology and its challenges. IEICE Electron. Express 11(10): 20142005 (2014)

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