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"Improved phase-detection method using an air-coupled ultrasonic wave for a ..."
Katsuhiro Sasaki, Morimasa Nishihira, Kazuhiko Imano (2004)
- Katsuhiro Sasaki, Morimasa Nishihira, Kazuhiko Imano:
Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements. IEICE Electron. Express 1(15): 472-476 (2004)

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