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"Impact of the double-patterning technique on the LER-induced threshold ..."

Seulki Park, Ju Han Lee, Changhwan Shin (2015)

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DOI: 10.1587/ELEX.12.20150349

access: open

type: Journal Article

metadata version: 2021-02-12

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Seulki Park, Ju Han Lee, Changhwan Shin:
Impact of the double-patterning technique on the LER-induced threshold voltage variation in symmetric tunnel field-effect transistor. IEICE Electron. Express 12(12): 20150349 (2015)

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