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"Contact resistivity reduction for PtSi/Si(100) by dopant segregation process."
Shun'ichiro Ohmi, Jun Arima (2013)
- Shun'ichiro Ohmi, Jun Arima:
Contact resistivity reduction for PtSi/Si(100) by dopant segregation process. IEICE Electron. Express 10(24): 20130778 (2013)
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