"Investigation of Cu ion drift through CVD TiSiN into SiO2 under bias ..."

Takashi Kawanoue et al. (2005)

Details and statistics

DOI: 10.1587/ELEX.2.254

access: open

type: Journal Article

metadata version: 2021-02-12

a service of  Schloss Dagstuhl - Leibniz Center for Informatics