"Electromechanical theory of microelectromechanical devices."

Gen Hashiguchi (2014)

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DOI: 10.1587/ELEX.11.20142007

access: open

type: Journal Article

metadata version: 2021-02-12

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Gen Hashiguchi:
Electromechanical theory of microelectromechanical devices. IEICE Electron. Express 11(18): 20142007 (2014)

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