"Atomic configuration of boron pile-up at the Si/SiO2 interface."

Masayuki Furuhashi et al. (2004)

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DOI: 10.1587/ELEX.1.126

access: open

type: Journal Article

metadata version: 2022-06-10

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Masayuki Furuhashi, Tetsuya Hirose, Hiroshi Tsuji, Masayuki Tachi, Kenji Taniguchi:
Atomic configuration of boron pile-up at the Si/SiO2 interface. IEICE Electron. Express 1(6): 126-130 (2004)

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