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"Fabrication of suspended metallic structures: application to a one-shot ..."

Alexis Debray et al. (2007)

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DOI: 10.1587/ELEX.4.455

access: open

type: Journal Article

metadata version: 2021-02-12

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  - journals/ieiceee/DebrayUSF07
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  - https://dblp.org/rec/journals/ieiceee/DebrayUSF07
Alexis Debray, Kazuyuki Ueda, Masaaki Shibata, Hiroyuki Fujita:
Fabrication of suspended metallic structures: application to a one-shot micro-valve. IEICE Electron. Express 4(14): 455-460 (2007)

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