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"Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot ..."

Yuki Adachi et al. (2023)

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DOI: 10.1587/ELEX.20.20230054

access: open

type: Journal Article

metadata version: 2023-07-25

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  dblp key:
  - journals/ieiceee/AdachiXYZMKKMMK23
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  - https://dblp.org/rec/journals/ieiceee/AdachiXYZMKKMMK23
Yuki Adachi, Yifan Xiong, Hanqiao Ye, Rubing Zuo, Masaya Morita, Kenta Kaichi, Ryosei Kinoshita, Masato Morifuji, Akihiro Maruta, Hirotake Kajii, Masahiko Kondow:
Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser. IEICE Electron. Express 20(7): 20230054 (2023)

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