"Fly's-Eye Lens Technique for Generating Semiconductor Device Fabrication ..."

William E. Rudge, William E. Harding, Walter E. Mutter (1963)

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DOI: 10.1147/RD.72.0146

access: closed

type: Journal Article

metadata version: 2020-03-13

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William E. Rudge, William E. Harding, Walter E. Mutter:
Fly's-Eye Lens Technique for Generating Semiconductor Device Fabrication Masks. IBM J. Res. Dev. 7(2): 146-150 (1963)

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