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ORCID"Plasma-based dry etching techniques in the silicon integrated circuit ..."
Gottlieb S. Oehrlein, John F. Rembetski (1992)
- Gottlieb S. Oehrlein
, John F. Rembetski:
Plasma-based dry etching techniques in the silicon integrated circuit technology. IBM J. Res. Dev. 36(2): 140-157 (1992)
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