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"Atomic force microscopy studies of SiGe films and Si/SiGe heterostructures."

Martin A. Lutz, Randall M. Feenstra, Jack O. Chu (1995)

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DOI: 10.1147/RD.396.0629

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - journals/ibmrd/LutzFC95
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  - https://dblp.org/rec/journals/ibmrd/LutzFC95
Martin A. Lutz, Randall M. Feenstra, Jack O. Chu:
Atomic force microscopy studies of SiGe films and Si/SiGe heterostructures. IBM J. Res. Dev. 39(6): 629-638 (1995)

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