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"Manufacturing with DUV lithography."

Steven J. Holmes, Peter H. Mitchell, Mark C. Hakey (1997)

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DOI: 10.1147/RD.411.0007

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - https://dblp.org/rec/journals/ibmrd/HolmesMH97
Steven J. Holmes, Peter H. Mitchell, Mark C. Hakey:
Manufacturing with DUV lithography. IBM J. Res. Dev. 41(1&2): 7-20 (1997)

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