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"Growth and characterization of ultrathin nitrided silicon oxide films."

Evgeni P. Gusev et al. (1999)

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DOI: 10.1147/RD.433.0265

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - journals/ibmrd/GusevLGGG99
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  - https://dblp.org/rec/journals/ibmrd/GusevLGGG99
Evgeni P. Gusev, Hsu-Chang Lu, Eric L. Garfunkel, Torgny Gustafsson, Martin L. Green:
Growth and characterization of ultrathin nitrided silicon oxide films. IBM J. Res. Dev. 43(3): 265-286 (1999)

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