BibTeX record journals/ibmrd/Gillespie84

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@article{DBLP:journals/ibmrd/Gillespie84,
  author    = {Sherri J. Gillespie},
  title     = {Resist Profile Control in E-Beam Lithography},
  journal   = {{IBM} J. Res. Dev.},
  volume    = {28},
  number    = {4},
  pages     = {454--460},
  year      = {1984},
  url       = {https://doi.org/10.1147/rd.284.0454},
  doi       = {10.1147/rd.284.0454},
  timestamp = {Fri, 13 Mar 2020 10:54:19 +0100},
  biburl    = {https://dblp.org/rec/journals/ibmrd/Gillespie84.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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