"Reduction of Leakage by Implantation Gettering in VLSI Circuits."

Hank J. Geipel, W. K. Tice (1980)

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DOI: 10.1147/RD.243.0310

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type: Journal Article

metadata version: 2024-10-30

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Hank J. Geipel, W. K. Tice:
Reduction of Leakage by Implantation Gettering in VLSI Circuits. IBM J. Res. Dev. 24(3): 310-317 (1980)

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