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ORCID"Doped SiO2 deposition from TMP in APCVD."
L. D. Bartholomew et al. (1990)
- L. D. Bartholomew, N. M. Gralenski, J. C. Sisson, G. U. Pignatel:
Doped SiO2 deposition from TMP in APCVD. Eur. Trans. Telecommun. 1(2): 167-172 (1990)
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