"A Defect Detection Method of Mixed Wafer Map Using Neighborhood Path ..."

Xingna Hou et al. (2024)

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DOI: 10.1007/S10836-024-06132-8

access: closed

type: Journal Article

metadata version: 2024-11-06

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Xingna Hou, Guanxiang Qin, Ying Lu, Mulan Yi, Shouhong Chen:
A Defect Detection Method of Mixed Wafer Map Using Neighborhood Path Filtering Clustering Algorithm. J. Electron. Test. 40(4): 419-433 (2024)

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