"Cycle time analysis for cluster tools with parallel process chambers, ..."

Chunrong Pan et al. (2024)

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DOI: 10.1016/J.ESWA.2024.124471

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type: Journal Article

metadata version: 2024-08-22

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Chunrong Pan, Yiming Lai, Yan Qiao, Naiqi Wu, Xin Luo:
Cycle time analysis for cluster tools with parallel process chambers, processing time variation, and chamber cleaning operations. Expert Syst. Appl. 255: 124471 (2024)

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