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"Use of adaptive network fuzzy inference system to predict plasma charging ..."
Byungwhan Kim, Hee Ju Kwon, Seongjin Choi (2009)
- Byungwhan Kim, Hee Ju Kwon, Seongjin Choi:
Use of adaptive network fuzzy inference system to predict plasma charging damage on electrical MOSFET properties. Expert Syst. Appl. 36(3): 6570-6573 (2009)
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