Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Virtual metrology for run-to-run control in semiconductor manufacturing."

Pilsung Kang et al. (2011)

> Home

Details and statistics

DOI: 10.1016/J.ESWA.2010.08.040

access: closed

type: Journal Article

metadata version: 2023-03-21

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/eswa/KangKLDC11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/eswa/KangKLDC11
Pilsung Kang, Dongil Kim, Hyoungjoo Lee, Seungyong Doh, Sungzoon Cho:
Virtual metrology for run-to-run control in semiconductor manufacturing. Expert Syst. Appl. 38(3): 2508-2522 (2011)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.