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"Modeling of Layout Aware Line-Edge Roughness and Poly Optimization for ..."

Yongchan Ban, David Z. Pan (2011)

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DOI: 10.1109/JETCAS.2011.2159286

access: closed

type: Journal Article

metadata version: 2017-05-20

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Yongchan Ban, David Z. Pan:
Modeling of Layout Aware Line-Edge Roughness and Poly Optimization for Leakage Minimization. IEEE J. Emerg. Sel. Topics Circuits Syst. 1(2): 150-159 (2011)

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