"Spatial defect pattern recognition on semiconductor wafers using ..."

Tao Yuan, Way Kuo (2008)

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DOI: 10.1016/J.EJOR.2007.06.007

access: closed

type: Journal Article

metadata version: 2020-02-21

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Tao Yuan, Way Kuo:
Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference. Eur. J. Oper. Res. 190(1): 228-240 (2008)

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