"Job scheduling of diffusion furnaces in semiconductor fabrication facilities."

Kan Wu et al. (2022)

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DOI: 10.1016/J.EJOR.2021.09.044

access: closed

type: Journal Article

metadata version: 2022-12-28

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Kan Wu, Edward Huang, Mengchang Wang, Meimei Zheng:
Job scheduling of diffusion furnaces in semiconductor fabrication facilities. Eur. J. Oper. Res. 301(1): 141-152 (2022)

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