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"Comprehensive Static Characterization of Vertical Electrostatically ..."
Edward K. Chan, Krishna Garikipati, Robert W. Dutton (1999)
- Edward K. Chan, Krishna Garikipati, Robert W. Dutton:
Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams. IEEE Des. Test Comput. 16(4): 58-65 (1999)
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