"Particle-in-Cell/Monte Carlo simulation of CF4 discharge in ..."

Jonghyuk Kang, Ganyoung Park, Jaekoo Lee (2007)

> Home

Details and statistics

DOI: 10.1016/J.CPC.2007.02.011

access: closed

type: Journal Article

metadata version: 2020-02-21

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/cphysics/KangPL07
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/cphysics/KangPL07
Jonghyuk Kang, Ganyoung Park, Jaekoo Lee:
Particle-in-Cell/Monte Carlo simulation of CF₄ discharge in capacitively coupled plasma reactor. Comput. Phys. Commun. 177(1-2): 129-130 (2007)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.