"Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films"

George Yong Liu et al. (2000)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2020-01-10

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/cs-CE-0011014
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  persistent URL:
  - https://dblp.org/rec/journals/corr/cs-CE-0011014
George Yong Liu, Ray F. Zhang, Kelvin Hsu, Lawrence Camilletti:
Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films. CoRR cs.CE/0011014 (2000)

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