"Autonomous, Self-driving Multi-Step Growth of Semiconductor ..."

Chao Shen et al. (2024)

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DOI: 10.48550/ARXIV.2408.03508

access: open

type: Informal or Other Publication

metadata version: 2024-09-28

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Chao Shen, Wenkang Zhan, Hongyu Sun, Kaiyao Xin, Bo Xu, Zhanguo Wang, Chao Zhao:
Autonomous, Self-driving Multi-Step Growth of Semiconductor Heterostructures Guided by Machine Learning. CoRR abs/2408.03508 (2024)

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