"EllipBench: A Large-scale Benchmark for Machine-learning based ..."

Yiming Ma et al. (2024)

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DOI: 10.48550/ARXIV.2407.17869

access: open

type: Informal or Other Publication

metadata version: 2024-11-08

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Yiming Ma, Xinjie Li, Xin Sun, Zhiyong Wang, Lionel Z. Wang:
EllipBench: A Large-scale Benchmark for Machine-learning based Ellipsometry Modeling. CoRR abs/2407.17869 (2024)

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