"FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage ..."

Qianjun Zhang et al. (2023)

Details and statistics

DOI: 10.48550/ARXIV.2307.11774

access: open

type: Informal or Other Publication

metadata version: 2023-08-20

a service of  Schloss Dagstuhl - Leibniz Center for Informatics