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ORCID"Physics-separating artificial neural networks for predicting sputtering ..."
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann (2023)
- Tobias Gergs, Thomas Mussenbrock
, Jan Trieschmann:
Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales. CoRR abs/2301.03524 (2023)
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