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"Vibration suppression of a state-of-the-art wafer gripper."
M. El Ajjaj et al. (2022)
- M. El Ajjaj, Marcin B. Kaczmarek, M. A. C. C. van den Hurk, S. Hassan HosseinNia:
Vibration suppression of a state-of-the-art wafer gripper. CoRR abs/2212.01854 (2022)
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