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"Machine learning plasma-surface interface for coupling sputtering and ..."

Florian Krüger, Tobias Gergs, Jan Trieschmann (2018)

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DOI: 10.48550/ARXIV.1810.04510

access: open

type: Informal or Other Publication

metadata version: 2023-07-07

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  - journals/corr/abs-1810-04510
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Florian Krüger, Tobias Gergs, Jan Trieschmann:
Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations. CoRR abs/1810.04510 (2018)

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