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"A Two-Step Etching Method to Fabricate Nanopores in Silicon"
Gou-Jen Wang, Wei-Zheng Chen, Kang J. Chang (2008)
- Gou-Jen Wang, Wei-Zheng Chen, Kang J. Chang:
A Two-Step Etching Method to Fabricate Nanopores in Silicon. CoRR abs/0802.3087 (2008)
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