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"A Two-Step Etching Method to Fabricate Nanopores in Silicon"

Gou-Jen Wang, Wei-Zheng Chen, Kang J. Chang (2008)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2023-01-30

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0802-3087
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0802-3087
Gou-Jen Wang, Wei-Zheng Chen, Kang J. Chang:
A Two-Step Etching Method to Fabricate Nanopores in Silicon. CoRR abs/0802.3087 (2008)

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