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"Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion ..."

Teruhisa Akashi, Yasuhiro Yoshimura (2008)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2020-04-06

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0802-3085
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0802-3085
Teruhisa Akashi, Yasuhiro Yoshimura:
Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching. CoRR abs/0802.3085 (2008)

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