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"New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical ..."

D. Fabrègue et al. (2007)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2021-08-10

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0711-3332
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0711-3332
D. Fabrègue, Nicolas André, T. Pardoen, Jean-Pierre Raskin:
New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films. CoRR abs/0711.3332 (2007)

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