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"Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors"
Stefan Spinner et al. (2007)
- Stefan Spinner, Julian Bartholomeyczik, Bernd Becker, Michael Doelle, Oliver Paul, Ilia Polian, Roland Roth, Karl Seitz, Patrick Ruther:
Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors. CoRR abs/0711.3289 (2007)
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