"Stability analysis of semiconductor manufacturing process with EWMA ..."

Bing Ai, David Shan-Hill Wong, Shi-Shang Jang (2015)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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Bing Ai, David Shan-Hill Wong, Shi-Shang Jang:
Stability analysis of semiconductor manufacturing process with EWMA run-to-run controllers. CoRR abs/1510.08946 (2015)

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