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"Cycle time analysis of dual-arm cluster tools for wafer fabrication ..."

Yan Qiao et al. (2015)

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DOI: 10.1016/J.COR.2014.03.024

access: closed

type: Journal Article

metadata version: 2021-02-05

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Yan Qiao, Naiqi Wu, Qinghua Zhu, Liping Bai:
Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times. Comput. Oper. Res. 53: 252-260 (2015)

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