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"Design and modeling of a MEMS accelerometer based on coupled ..."
Ming Lyu et al. (2021)
- Ming Lyu, Jian Zhao
, Najib Kacem
, Bin Tang, Pengbo Liu, Jiahao Song, Heng Zhong, Yu Huang:
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation. Commun. Nonlinear Sci. Numer. Simul. 103: 105960 (2021)
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