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"A CMOS compatible process for monolithic integration of high-aspect-ratio ..."

Liang Qian, Zhenchuan Yang, Guizhen Yan (2014)

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DOI: 10.1007/S11432-014-5138-0

access: closed

type: Journal Article

metadata version: 2020-03-02

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Liang Qian, Zhenchuan Yang, Guizhen Yan:
A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures. Sci. China Inf. Sci. 57(8): 1-7 (2014)

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