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"Application of optical proximity correction technology."

Yici Cai et al. (2008)

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DOI: 10.1007/S11432-008-0006-4

access: closed

type: Journal Article

metadata version: 2020-05-18

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  dblp key:
  - journals/chinaf/CaiZHSW08
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  - https://dblp.org/rec/journals/chinaf/CaiZHSW08
Yici Cai, Qiang Zhou, Xianlong Hong, Rui Shi, Yang Wang:
Application of optical proximity correction technology. Sci. China Ser. F Inf. Sci. 51(2): 213-224 (2008)

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