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"Design of optical emission spectroscopy based plasma parameter controller ..."
Junmo Koo et al. (2017)
- Junmo Koo, Daegeun Ha, Damdae Park
, Hyun-Joon Roh, Sangwon Ryu, Gon-Ho Kim
, Kye Hyun Baek, Chonghun Han:
Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control. Comput. Chem. Eng. 100: 38-47 (2017)
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